Conventional probers compensates XY positions by machinary figure.

Plum Five Co. LTD prober is developed and applies a new concept of a position compensation method (XY position compensation hereafter) in which software guarantees position compensation accuracy.

In XY position compensation function, the software process information of accuracy acquired by the stage resolution, repeating accuracy, and image processing and guarantees accuracy.

Explained below is the technique in which XY position compensation function is used.

1. Stage compensation

Acquired and revises machinary accuracy of the stage by a common wafer or a glass mask.

2. Target compensation (PAT)

Actually compensates probing using unmeasured wafer pattern.

Because XY stage accuracy is decided by information theoretically from stage resolution and repeating function acquired by image process after above compensation, extremely high accurate probing is possible.

By utilizing this compensation function, compensation of a chip position by distortion and bending occurred by film tension and dicer blade after dicing, and probing are possible.